pH Adjustment Systems




pH Neutralization / pH Adjustment Systems for industrial wastewatertreatment 

OVERVIEW OF PROCESS SUPPORT SYSTEMS FOR THE

PHOTOVOLTAIC SOLAR CELL MANUFACTURING INDUSTRY  
A white paper by Wastech Controls & Engineering, Inc.

Introduction

Wastech Controls & Engineering, Inc. can design, fabricate and commission a complete range of process support and waste water treatment systems for the photovoltaic (PV) solar cell manufacturing industry. This paper describes these systems and their application within a PV manufacturing facility. Wastech systems are available for the following areas:

Waste Water Treatment
  • Acid Waste Neutralization
  • HF Removal
  • Heavy Metal Removal
  • Concentrated Bath Treatment
  • Polymer / Photo-Resist Filtration
  • Ion Exchange
Waste Collection
  • Concentrated Acid Waste Collection
  • Solvent Waste Collection
Process Support Systems
  • High Purity Chemical Delivery Modules
  • Pump Lift Stations
  • Process Cooling Water
  • Process Hot Water
  • DI Water Heating
  • Process Utility Monitoring
  • Air Dryer Automation System

Waste Water Treatment

Acid Waste Neutralization (AWN) systems adjust the pH of process waste water to within acceptable limits (typically 6 – 9) before discharging to the facility sewer connection. Reagent chemicals such as Caustic Soda and Sulfuric Acid are metered into reaction tanks at a rate proportional to the difference between the measured pH value and the target set point. Waste water sources may include process tools, de-ionized (DI) Water regeneration waste and scrubber blowdown. Incorporating the latest innovations in control strategy, such as feed forward control and hybrid mixing design, allow these systems to offer excellent performance and reliability with a smaller footprint and reduced chemical consumption with than traditional system designs.

Design Criteria:

  • Influent pH range of 2 to 12
  • Flow rates from <1 gpm to 400+ gpm
Configuration Options:
  • Batch or Continuous
  • Single, Double or Triple Reaction Stages
  • Molded or Fabricated Plastic Tanks or Fiberglas (FRP) Tanks
  • Air Operated Diaphragm or Electronic Chemical Metering Pumps
  • Tank Mixers and/or Recirculation Pump Mixing
  • Reagent day tanks or supplied direct from drums or totes
  • Automatic return of off-spec treated waste water to eliminate discharge violations
Control System Options:
  • Programmable Logic Controller (PLC) or Relay Controls
  • Influent permissive dry contacts for interlocks with upstream equipment
  • Common trouble alarm dry contacts for remote alarm notification
  • Paper or electronic data logging
  • Ethernet LAN communication for PLC controls
  • Building Management System (BMS) integration
HF Removal systems treat HF-bearing waste water from process tools, when the fluoride levels exceed allowable discharge limits. These batch treatment systems use reagent chemicals such as Calcium Chloride and Calcium Hydroxide to precipitate the fluoride ions. Following treatment and settling, the clear water is decanted to an AWN or discharged, and the sludge waste is separated by filtration for solid waste disposal.

Configuration Options:
  • Flow rates from <1 gpm to 40 gpm with effluent concentration < 20 ppm
  • Single or Multiple Batch Treatment Tanks
Control System Options: see AWN

Heavy Metal Removal systems treat rinse waters from Plating lines used to add soldering contacts to PV wafers. These rinse waters are acidic in nature and contain heavy metals such as copper, nickel and tin. Heavy Metal Removal can be a batch or continuous system, and uses a combination of pH adjustment, precipitation, flocculation, clarification and filtration to remove heavy metal oxides. Reagent chemicals may include Sodium Bisulfite, Sodium Metabisulfite, Sodium Thiosulftate, Ferric or Ferrous Chloride (among others) in addition to pH adjustment using Sodium Hydroxide and Sulfuric Acid. Wastech also offers the MetFloc™ chemical line that reduces the process steps, lowers chemical consumption and minimizes sludge generation. Using MetFloc™ simplifies the control strategy, requiring only pH adjustment; it does not rely on other measurements such as oxidation reduction potential (ORP). The clear water can be routed to an AWN or discharged directly, depending on the discharge limits. The filtrate is disposed of as solid waste.

Design Criteria:
  • Flow rates from < 1 gpm to 100 gpm
  • Influent metal concentration range of 10 to 1,000+ ppm
  • Effluent metal concentration range of < 1 to 10 ppm
Configuration Options:
  • Batch or Continuous
  • Traditional reagent chemical supplies or MetFloc™ chemicals
  • Molded or Fabricated Plastic Tanks or Fiberglas (FRP) Tanks
  • Reagent day tanks or supplied direct from drums or totes
  • Integral post-treatment pH adjustment prior to direct final discharge
Control System Options: see AWN

Concentrated Bath Treatment is used to treat concentrated acid solutions received from the cleaning baths found at the start or in the intermediate steps of a Plating Line, or from the baths of a Rack Strip tool (located downstream of a Plating Line). These solutions often exceed 10% strength of Sulfuric or Nitric acids and have high concentrations of heavy metals. While discharges from the baths may be infrequent or periodic, the solutions cannot be treated by the AWN or Heavy Metal Removal systems due to the strong acid concentration, and they are often collected for off-site disposal. The Concentrated Bath Treatment System can accept these concentrated solutions, and neutralize them in batches to the point where the waste can be metered into a Heavy Metal Removal system.

Design Criteria:
  • Flow rates from < 20 gpd to 1,000 gpd
Configuration Options:
  • Molded or Fabricated Plastic Tanks or Fiberglas (FRP) Tanks
  • Reagent day tanks or supplied direct from drums or totes
Polymer/Photo-Resist Filtration systems are used to remove the polymer materials that are etched off of wafers following a screen printing and chemical vapor deposition or plating step. These materials precipitate out of waste water with low pH and increase turbidity to the discharge. This filtration system accepts batch dumps from etching tools, and then reduces the pH to facilitate filtration. The solution is pumped through filter bags and discharged to an AWN. The solids are collected in the filter bags and disposed of as solid waste.

Design Criteria:

  • Flow rates from < 20 gpd to 1,000 gpd
Configuration Options:
  • Molded or Fabricated Plastic Tanks or Fiberglas (FRP) Tank
  • Reagent day tanks or supplied direct from drums or totes
Control System Options: see AWN

Ion Exchange (IX) is used to reclaim and reuse DI Water from rinse water waste. The system employs activated carbon filtration followed by Cation / Anion exchange to remove contaminant ions. This restores the water's resistivity and allows it to be reused in the process. The system uses Sulfuric Acid and Caustic Soda to regenerate the cation and anion resins. Inlet and outlet conductivity is measured to control the regeneration cycles and product water quality. The cation and anion resin canisters feature the Kinetico ® valve, which manages the counter-current regeneration cycles automatically. This patented valve technology eliminates dozens of actuated valves, simplifying system design and controls, as well as reducing consumption of regeneration chemicals. Standard systems are equipped with carbon filters, 5-micron filter bags at the inlet and outlet of the cation and anion canisters, and a UV lamp reactor at the discharge.

Design Criteria:
  • Flow rates from < 10 gpm to 100 gpm
  • Product Water Resistivity from 0.5 to >10.0 M-Ω cm
Configuration Options:
  • Redundant, parallel skid arrangements
  • Reagent day tanks or supplied direct from drums, totes or shared bulk supplies
Control System Options: see AWN

Waste Collection

Concentrated Acid Waste Collection systems receive batch dumps of concentrated acid waste water (typically > 10% strength), and then transfer the waste to drums or totes for off site disposal. The acids present may be Hydrofluoric, Hydrochloric or Nitric. The drum cabinet is equipped with load cells to automatically stop the filling operation once a drum is full. This eliminates the need for a level sensor to be placed in the drum by an operator. Both the receiving tank and the drum cabinet are fully contained for personnel safety.

Design Criteria (standard system):

  • Receiving Tank Capacity: 275 gal molded PE
  • Transfer Pump: One (1) 1-inch diameter air operated diaphragm pump
  • Drum Cabinet Capacity: One (1) 55 gal Chemical Drum
  • Secondary Containment: Welded PP
Configuration Options:
  • Larger Receiving Tank Capacity
  • Two (2) Drum Cabinets
  • Metering Pump transfer to separate HF Treatment or AWN system
Control System Options: see AWN

Solvent Waste Collection systems receive batch dumps of DI Water that contain appreciable amounts of flammable solvents, usually Isopropyl Alcohol (IPA). The solvent waste is automatically transferred into drums for off site disposal. These fire-safe systems are fabricated with stainless steel and either explosion–proof or intrinsically safe electrical components. Solvent waste may be delivered directly to the drums or to a receiving tank which will automatically transfer to drums, depending on the facility process requirements.

Design Criteria (standard system):
  • Fire-rated metal storage cabinet
  • Drum Cabinet Capacity: One (1) 55 gal Chemical Drum
  • Transfer Pump: One (1) stainless steel air operated pump with Teflon wetted parts
Configuration Options:
  • Receiving Tank with or without Secondary Containment
  • Two (2) Drum Cabinets
Control System Options:
  • Class 1 / Div II or Intrinsically Safe construction
  • Influent permissive dry contacts for interlocks with upstream equipment
  • Common trouble alarm dry contacts for remote alarm notification
  • Drum filling controlled load cells or ultrasonic level transmitter

Process Support Systems

High Purity Chemical Delivery Modules (CDM) deliver electronics grade chemicals from supply drums, totes or tanks to process tools located in the facility. These fully contained pump cabinets provide safe, reliable operation while preventing personnel exposure to corrosive or toxic chemicals. They feature welded polypropylene cabinets equipped with single or multiple air operated pumps. The supply and discharge tubing, fittings and wetted parts of instruments and pumps are constructed of Teflon® to assure the purity of delivered chemicals. CDM's are available for HF, HCl, NaOH, KOH, BOE, HNO3, H2SO4, H2O2, NH4OH, IPA and other chemicals on request.


Design Criteria (standard system):
  • Simplex High Purity Air Operated Pump (e.g. Trebor or Yamada)
  • 1-20 gpm flow rate at 10-75 psig
  • PFA (i.e. Teflon®) wetted components
  • 1 micron filter
  • Welded polypropylene cabinet
 
Configuration Options:
  • Duplex Pumps
  • Alternate OEM Pumps and wetted materials to match chemical compatibility
  • Automatic air purging
  • Nitrogen blanket pressure regulator and flow controls
  • Pump operation on permissive/demand signal or pressure control
  • Constant flow with backpressure control and return to the supply container
  • Valve Manifold Boxes (VMB) for branch distribution within Fab area
  • Stainless steel fabrication for solvents such as IPA
Control System Options:
  • Programmable Logic Controller (PLC) or Relay Controls
  • Pump permissive dry contacts for interlocks with upstream equipment
  • Integrated controls for CDM and downstream VMB
  • Safety alarms for open doors, leak containment, low and high pressure, proof of flow, and others
  • Automatic supply pressure control
  • Common trouble alarm dry contacts for remote alarm notification
  • Ethernet LAN communication for PLC controls
  • Building Management System (BMS) integration
Pump Lift Stations are used to transfer process tool waste water from gravity-fed drain lines to treatment systems downstream. The lift stations may be located close to process tools, or remote from the fabrication area in a facility vault or yard area. The tank, pump and piping materials selection will be matched to the expected process conditions.

Pump Options:

  • Air Operated Diaphragm Pump
  • Vertical or Horizontal Centrifugal
  • Simplex or Duplex Configurations
Tank Options:
  • Tank capacities from 16 gal to 2,000 gal
  • Single Tank or with Secondary Containment Tank
  • Molded or fabricated plastic tank construction (PP, PE, PVDF, PVC or CPVC)
  • Stainless Steel Construction
  • With or without valve manifold enclosures
Control System Options:
  • Level point switches or continuous transmitters
  • Local or remote control panel
  • Upstream and downstream permissive signals
  • Flow and pressure indicators and/or transmitters
  • Secondary containment leak alarm
Process Cooling Water (PCW) provides cooling water to heat exchangers within process tools to regulate operating temperatures. Process tools require purified water (i.e., either reverse osmosis (RO) or de-ionized (DI) quality) as a medium for cooling to avoid product or tool contamination in the event of a heat exchanger leak. Wastech builds PCW skids that include the pumps, filters, heat exchangers and controls to supply cooling water at the flow rate and temperature required by the facility. The PCW fluid is cooled by heat exchange with the facility's chilled water system.

Configuration Options:
  • Flow rates from 50 gpm to 2,400 gpm
  • Supply pressures from 20 psig to 110 psig
  • Multiple redundant stainless steel pump arrangements
  • Variable Frequency Drive (VFD) pump control
  • Stainless steel plate and frame heat exchangers
  • 20 micron filter unit
  • Sch 80 PVC or Stainless steel piping
  • Nitrogen blanket pressure regulator and flow controls for vented systems
  • Expansion tank for closed systems
  • Powder-coated structural steel skid
Control System Options:
  • Programmable Logic Controller (PLC) or Relay Controls
  • Automatic supply pressure and temperature control
  • Common trouble alarm dry contacts for remote alarm notification
  • Ethernet LAN communication for PLC controls
Process Hot Water provides hot water in a closed loop to heat exchangers within wet bench tools that require elevated temperatures for wafer processing solutions. PHW skids include a gas-fired boiler, pumps, filters, expansion tank, water treatment chemical feeder and controls to supply heating water at the flow rate and temperature required by the facility.

Configuration Options:

  • Flow rates from 200 gpm to 300 gpm
  • Supply pressures from 20 psig to 100 psig
  • 2 MMBTU to 5.4 MMBTU heat output capacity
  • Output temperatures up to 203°F (95°C)
  • Multiple redundant pump arrangements
  • Variable Frequency Drive (VFD) pump control
  • Powder-coated structural steel skid
  • Welded carbon steel piping
  • Expansion tank and chemical addition feeder
Control System Options:
  • Programmable Logic Controller (PLC) or Relay Controls
  • Automatic supply pressure and temperature control
  • Common trouble alarm dry contacts for remote alarm notification
  • Ethernet LAN communication for PLC controls
DI Water Heating is a heat exchanger package delivering hot DI water to wet bench tools that require direct filling or dosing of process solutions with DI water at an elevated temperature. The skid includes a titanium plate and frame heat exchanger, flow control valves and temperature controller. This system exchanges heat from a Process Hot Water (PHW) supply and a DI Water source.

Configuration Options:

  • Flow rates from 20 gpm to 40 gpm
  • Output temperatures up to 185°F (85°C)
  • Titanium plate and frame heat exchanger
  • PVDF piping
  • Welded polypropylene skid
Control System Options:
  • Programmable Logic Controller (PLC) or Relay Controls
  • Automatic supply pressure and temperature control
  • Common trouble alarm dry contacts for remote alarm notification
Process Utility Monitoring systems monitor key parameters (e.g. pressure or flow rate) for critical process utilities such as Compressed Dry Air (CDA), Nitrogen (N2) and process water. Measured values and alarms can be displayed locally or remotely. Air Dryer Automation System (ADAS) is a supervisory controller that monitors the Compressed Dry Air (CDA) supply to the facility and operates redundant compressor / dryer units at maximum efficiency. Facilities have two or more air compressor and dryer units to guarantee uninterrupted process tool operation. ADAS distributes load to air dryers based on time and alarms, thus reducing on-line time and service costs, and yielding significant electrical power savings. ADAS places redundant units on stand-by during periods of low CDA demand. It will also rotate the lead and lag status of each unit on a user definable schedule, so that operating hours can be evenly distributed among all units. ADAS will notify facility personnel of alarm conditions, and make emergency responses such as opening a back up Nitrogen supply line in the event of complete compressor or dryer failure.
 
 
Configuration Options:
  • Two (2), three (3) or more compressor / dryer arrangements
  • Compressor and Dryer status monitoring
  • Dryer alarm monitoring
  • High and low line pressure monitoring
  • Dew point monitoring
  • CDA Flow rate
  • Open/closed status of actuated valves for receiver tanks and prefilters
  • Cooling water flow and temperature
Control System Options:
  • Fully automatic Programmable Logic Controller (PLC) operation
  • Ethernet LAN communication for PLC controls
  • Human Machine Interface (HMI) color touch screens from 6 to 15 inches diagonal
  • Common trouble alarm dry contacts for remote alarm notification
  • Alarm history logging
  • Building Management System (BMS) integration

 

Wastech Company Profile

Wastech Controls & Engineering, Inc. (Wastech) was founded in 1987 by Paul Nicolas and has been in continuous operation under the same ownership and management since then. Wastech has become a nationally recognized process system integrator, offering automated process equipment and control systems for industrial applications. Wastech is staffed by engineers experienced in system design, fabrication, installation supervision, start-up assistance, and operator training.

Wastech has specialized in turn-key packaged systems for industrial waste water treatment applications in semiconductor, solar cell, pharmaceutical, biotechnology, metal plating and food processing facilities. Wastech offers a complete line of pump lift stations, specialized chemical mixing, batching, blending and dispensing packages, process cooling and heating systems, and process control panels in addition to fully automated waste treatment processes, such as pH neutralization, vacuum distillation, advanced oxidation and ion exchange.

Wastech has a UL508-approved panel fabrication shop with a reputation for reliable electrical and control designs with a high level of craftsmanship. Wastech is a Solution Provider for Allen Bradley and Rockwell Automation components and software.

Wastech is a certified member of the Control System Integrators Association (CSIA), which means that an auditor has evaluated Wastech's business practices to insure that they conform to the CSIA's Best Practices and Benchmarks. See www.controlsys.org for more information.

Wastech has developed its own blend of waste treatment MetFloc™ chemicals through the Pavlos Chemicals Company. These products offer surprising performance and cost effectiveness for removing heavy metal and other contaminants from waste water.

Our experienced team of engineers and supplier partners insure that our solutions are delivered on-time and perform beyond the customer's expectations.